Technical Training
Course Objectives - VIISta Factory Automation (Synergy EFEM) Theory and Maintenance
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Course Details Details 

Name: 

VIISta Factory Automation (Synergy EFEM) Theory and Maintenance 

Code: 

TRAI1978e

Length: 

4 Days 

Delivery: 

Instructor Led

Course Objectives Objectives  Upon completion of this course, participants will be able to:
  • Module 1 Introduction
    • 2: Major subsystem purpose
    • 3: Major subsystem components
    • 4: Documentation layout
  • Module 2 Machine Safety
    • 1: Hazard labels
    • 2: Safety pictorials
    • 3: Machine hazards
    • 4: EMO and ERS purpose and location
  • Module 3 Support Subsystems
    • 1: Function of the Support subsystems
    • 2: EFEM detailed layout and function
    • 3: Control subsystem detailed layout and function
    • 4: Master Buffer Controller layout and function
    • 5: EFEM Power Distribution subsystem detailed layout and function
    • 6: Gaseous Facilities subsystems detailed layouts and functions
  • Module 4 Wafer Handling Subsystems
    • 1: Function and layout of the wafer Handling subsystems
    • 2: Wafer Transport Pod (FOUP) subsystem function and layout
    • 3: Wafer Pod Docking (PDO) subsystem function, layout, and operating parameters
    • 4: FOUP tracking methods
    • 5: Wafer Transfer and Tracking subsystem function
    • 6: EFEM Robot layout, function, and operating parameters
    • 7: EFEM Robot Wafer Mapping function, layout, and operating parameters
    • 8: Robot Controller layout, function, and operating parameters
    • 9: Describe the optional Wafer ID Reader
  • Module 5 Operations, Maintenance, and Alignments
    • 1: Layout and content of the Equipment Reference Manual and vendor manuals
    • 2: EFEM operations tasks
      • a. System initialization (using the Teach Pendant and VCS control screens)
      • b. Manual wafer transfer between EFEM stations (using the Teach Pendant and VCS control screens)
      • c. Cycle wafers automatically between the EFEM and the VIISta End Station (using the VCS control screens)
      • d. System error recovery (using the Teach Pendant and VCS control screens)
    • 3: VSEA preventive maintenance philosophy
    • 4: Atmospheric Transfer Robot and Mini-Environment Preventive Maintenance
      • a. Robot pick cleaning
      • b. Robot Lubrication
      • c. Track Lubrication
      • d. Robot Belt Tensioning
      • e. APCSFan Flow Unit flow and pressure operational specification verification
      • f. Robot Battery Replacement
      • g. End Effector Peek pad replacement
      • h. Emulator Log File download
    • 5: PDO maintenance and alignment tasks
      • a. PDO layout and familiarization task
      • b. PDO removal, installation, and leveling task
      • c. PDO manual operation task
      • d. PDO software verification, installation, and operation task
      • e. PDO timing checks and adjustments task
      • f. PDO pneumatic and vacuum checks and adjustments task
      • g. PDO door position checks and adjustments task
      • h. PDO docking and piston checks and adjustments task
      • i. PDO FOUP cycle verification task
    • 6: Atmosphere Transfer Robot alignment tasks
      • a. EFEM and Robot track leveling verification
      • b. Robot Standard Position verification/alignment
      • c. Robot arm and blade leveling and alignment
      • d. Robot blade wafer present sensor verification/ adjustment
      • e. Robot controller settings and parameters upload and download
      • f. Robot to PDO multi-blade and single blade axis alignment
      • g. Robot to PDO wafer mapping alignment
      • h. Robot to Load Lock multi-blade and single blade alignment
      • i. Robot to Load Lock wafer mapping alignment
  • Module 6 Diagnostics and Troubleshooting
    • 1: Layout and content of the Equipment Reference Manual and vendor manuals
    • 4: Vendor software diagnostics response interpretation
      • a. Interpreting the robot ?Error Code? response using the Teach Pendant and the robot controller
      • b. Interpreting the PDO ?io statfxl?, ?io stat_m?, ?io stat_pdo?, and ?io stat_lp? responses using the available PDO software (Brooks Version 6M only)
    • 5: Perform fault isolation and diagnostics